JPS63105335U - - Google Patents
Info
- Publication number
- JPS63105335U JPS63105335U JP20286286U JP20286286U JPS63105335U JP S63105335 U JPS63105335 U JP S63105335U JP 20286286 U JP20286286 U JP 20286286U JP 20286286 U JP20286286 U JP 20286286U JP S63105335 U JPS63105335 U JP S63105335U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer machine
- sensor
- prevention device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20286286U JPH0333066Y2 (en]) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20286286U JPH0333066Y2 (en]) | 1986-12-24 | 1986-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63105335U true JPS63105335U (en]) | 1988-07-08 |
| JPH0333066Y2 JPH0333066Y2 (en]) | 1991-07-12 |
Family
ID=31167645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20286286U Expired JPH0333066Y2 (en]) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333066Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |
-
1986
- 1986-12-24 JP JP20286286U patent/JPH0333066Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333066Y2 (en]) | 1991-07-12 |